【摘要】 在“Y”型光纤一个端面上垂直放置涂有透明薄膜的玻璃片 ,入射光在薄膜层的上下表面处两次反射 ,由于光程差的存在 ,反射光会发生干涉。不需要测量干涉条纹 ,根据 Fresnel反射定律 ,仅通过对反射光谱的分析计算 ,可以测出薄膜的厚度以及折射率。该方法测量精度高、速度快、对薄膜无破坏作用。膜厚测量范围为 0 .5至几十微米 ,测量误差小于 7nm。更多还原

【Abstract】 Place a piece of glass vertically to a “Y” type optical fiber, on which a transparent film was clinging. Incident light is reflected twice at the two interfaces of film. Because of the optical path difference between the two reflected lights, interference should be formed. Film thickness can be calculated, no need testing the interference stripe. This method is accurate, fast, wide test range and no-destructive. Test range is from 0.5nm to several tens of μm, test error no more than 7nm.更多还原