【摘要】 介绍了压电谐振式微悬臂梁的设计、制作方法和作为质量传感器的工作原理,及其在空气质量检测上的应用。实验结果验证了设计方法正确,制作工艺可行。在特定敏感层的作用下,该传感器对氟利昂气体在500×10^-6范围内的响应呈指数衰减,在100×10^-6范围内呈线性响应,灵敏度达-0.002 4％×10⁶,最小可测质量为3.5×10^-9g。更多还原

【Abstract】 In this paper, design and fabrication of piezoelectric resonance microcantilever are introduced. As a mass sensor, its working principle and application in the field of air quality detection are also presented. The experimental results demonstrate the designing method is valid and the processing is feasible. By the action of a specific sensing layer, its responses to gas Freon decay exponentially within the range of 500×10-6 and approach linearity when the gas concentration is lower than 100×10-6 with sensitivity of -0.002 4%×106 and minimum detectable mass of 3.5×10-9g.更多还原