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TiO₂陶瓷在磁控溅射中电导率改变机理研究

Research on the Mechanism of the Changing Conductivity of TiO₂ Ceramics in RF Magnetic Sputtering

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【Author】 ZHAO Daqing,YANG Feng(Dept.of Engineering,Tsinghua University,Beijing 100084,China)

【机构】清华大学机械工程系；清华大学机械工程系北京100084；北京100084；

【摘要】在Ar气氛中对TiO2陶瓷进行射频磁控溅射时,TiO2陶瓷电导率发生显著变化。该文对这一现象进行了研究。采用多种分析手段对实验结果进行了分析。分析表明,辉光放电电离Ar气所产生的Ar离子冲击TiO2陶瓷表面的热量和动量被O2-吸收,引起O2-溢出TiO2陶瓷,导致TiO2化学配比偏离正常,从而提高了TiO2陶瓷的电导率。更多还原

【Abstract】 The electric conductivity of TiO2 ceramics changed in the RF magnetic sputtering.This paper made research on this phenomenon.Research result shows that bombing by Ar ion on the surface of the TiO2 ceramics produce much heat in the RF magnetic sputtering which caused the oxygen deficient in the TiO2 ceramics.The electric conductivity of TiO2 ceramics changed as the oxygen deficient.更多还原