【摘要】 X射线光电子能谱测试(XPS)分析C(膜)/Si(SiO2)(纳米微粒)/C(膜)样品发现:把400℃退火后的样品继续加热到650℃并退火1h后,样品中除原有的Si晶体外,生成了SiC晶体,同时还出现了SiO2晶体,这表明一部分Si与C反应生成SiC的同时,氧气的氧化作用占主导地位,把大部分Si氧化成了SiO2.对比分析在650℃和750℃退火后样品的Raman谱发现:随着加热温度的升高,SiC与Si含量增加而SiO2含量减少.这表明:在750℃时,C原子的还原作用继400℃后再次占主导地位,又把一部分SiO2还原成Si.更多还原

【Abstract】 The binding energies of C,Si,O in the sample annealed at 650 ℃ are analyzed by the means of XPS. It is found that SiC and SiO2 crystals are formed at 650 ℃. It seemed that the oxidation of oxygen occupies dominant position at 650 ℃, so most of Si are oxidized to form SiO2, and the remains of Si react with C to form SiC. Contrasting the Raman spectrum of the sample annealed at 650 ℃ with the Raman spectrum at 750 ℃, it is found that the amount of SiC and Si both increase. On the contrary, the amount of SiO2 decrease at 750 ℃. It can be concluded that the reduction of carbon atoms occupies dominant position at 750 ℃again.更多还原