【摘要】 研究讨论了在脉冲工作方式下,碳等离子体源的发射特性.根据离子束流分布和膜层厚度测试结果,分析了影响脉冲碳等离子体源发射特性的因素.给出了改善脉冲碳等离子体源发射特性的途径.更多还原

【Abstract】 The emission characteristic of carbon plasma arc-discharger under the pulse mode was studied. According to the results of distribution of ion current and film thickness, the factors influencing the emission characteristics of carbon plasma arc-discharger were analyzed, and the approaches to improve the emission characteristics were presented.更多还原