【摘要】 研究了应用移相干涉术测量新的1等量块的方法.对于干涉图像进行多幅图的采样,由移相法计算量块测量面和与其研合的辅助平晶表面的波面面形,尤其研究了在量块干涉图中有阶跃不连续的波面复原运算的原理与技术,得到一组表征它们表面的离散波差值,并给出量块工作面长度和长度变动量的测量结果.更多还原

【Abstract】 The method to measure the new first grade gauge block by phase-shift interferometry has been studied. Firstly, multi-frame interference patterns are captured by CCD, then the shape of the measured surface of the gauge and the assistant reference flat to be wrung are obtained by phase-shift arithmetic. The unwrapping wavefront principle and technology when there are step and discontinuity in the gauge interference patterns are studied. The discrete wave which is fitted to be a continous and smooth surface error is calculated. The paper discussed measurement of guage block length,and presented measurement result of working face length dynamic argument of guage block.更多还原