【摘要】 TMAH是一种新型的、性能优异的各向异性腐蚀液。文章通过大量对比实验,对该腐蚀液用于<100>、<111>单晶Si片不同电阻率、不同晶向的样品研究了粗糙度和腐蚀速率,得出重要结论。此研究对正确使用TMAH腐蚀液有重要指导意义。更多还原

【Abstract】 TMAH solution was a new-type anisotropic etchant whose property was excelent.In order to compare the etching roughness and etching rates,We carried out a series of experi-ments using<100>and<111>single crastal silicon wafers with different specific resistance and different crystal directions.The paper had a significant meaning to use TMAH solution correct-ly.更多还原