【摘要】 提出ERA系统(ElectronicRealizationAutomation)的概念。该系统的目标是实现微细结构,特别是VLSIC的全自动化制造。对于微细结构制造来说,以下四个问题是根本性的,同时也是最为重要的,即:微细结构的表达及相关运算;加工流程的确定;生产安排及作业调度;工艺的控制、分析、诊断。以上四者构成了ERA系统的关键模块,并讨论了实现这些模块的关键技术。更多还原

【Abstract】 The concept of an ERA (Electronic Realization Automation) system is presented.The ERA system focuses on the automatic manufacturing of microstructures, especially VLSICs.There are four critical techniques in an ERA system, they are:the way that defines a microstructure and the structure related processes,the way that automatically generates a fabricating sequences for an arbitrary microstructure,the way for production planning and job scheduling,the way of process control, diagnose, optimization.These are naturally the base of Microstructure Manufacturing Methodology, and are discussed here for describing the ERA system.更多还原