节点文献
0-3型(Ba1-x-ySrxPby)(Mn,Ti)O3铁电厚膜的制备与表征
Fabrication and Characterization of 0-3-type MPBST Ferroelectric Thick Film
【摘要】 铁电纳米超细粉体的合成与分散技术是成功制备0-3型铁电厚膜的关键和难点之一。采用Sol-Gel技术可制备呈球形软团聚、钙钛矿相结构完整的30nm~70nmMPBST超细粉体,以及致密无裂纹、表面光洁和铁电性能优良(Pr=3.8μC/cm2)的0-3型铁电厚膜。通过TEM、XRD、TGA-DTA、AFM等手段分析了Sol-Gel工艺的化学机制和热演化历程,结果表明:采用以乙二醇乙醚为主要溶剂的Sol-Gel技术可降低MPBST粉体/厚膜的合成温度,提高粉体均匀性和晶相结构单一性。
【Abstract】 The synthesis and dispersion of ferroelectric nanopowder is one of key technologies for the 03type thick films preparation. MPBST ferroelectric nanopowder whose grain size is about 30nm~70nm has been successfully derived from SolGel technique. It exhibits spheroid and loose accumulation with a pure perovskite phase structure. The typical 0-3 thick film with smooth surface no cracks and excellent ferroelectricity(Pr is 3.8μC/cm2) is also prepared by Sol-Gel technique.TEM,XRD,TGADTA and AFM are employed to analyze the thermal course and chemical mechanism of SolGel technique. The results show that using Ethylene glycol monoethyl ether (C2H5OC2H4OH) as main solvent the technique can effectively decrease the synthesize temperature of MPBST powder and thick film, and increase homogenization and crystallization purity of the powder.
【Key words】 nano-powder; Sol-Gel technique; 0-3-type ferroelectric thick film; dispersing;
- 【文献出处】 微细加工技术 ,Microfabrication Technology , 编辑部邮箱 ,2003年03期
- 【分类号】TN304.05
- 【被引频次】2
- 【下载频次】95