【摘要】 采用反应磁控溅射制备了AlN VN纳米多层膜 .研究了多层膜调制周期对AlN生长结构的影响以及纳米多层膜的力学性能 .结果表明 :小周期多层膜中的AlN以亚稳的立方相 (c AlN)存在并与VN形成共格外延生长的超晶格 .薄膜产生硬度和弹性模量升高的超硬效应 .大调制周期下 ,AlN从立方结构转变为稳定的六方相 (h AlN) ,并使多层膜形成纳米晶的“砖墙”型结构 .讨论认为VN的模板作用有利于c AlN的生长 ,但不能显著提高其临界厚度更多还原

【Abstract】 AlN/VN nanomultilayers were prepared by reactive magnetron sputtering method. The effect of modulation period on the microstructure and mechanical properties of AlN/VN nanomultilayers were studied in this work. The results show that AlN exists in metastable cubic structure (c AlN) at small modulation period and forms coherent epitaxial grown superlattice with VN. At larger modulation periods, AlN transforms from cubic structure to stable hexagonal structure (h AlN),and the nanomultilayers form a “brick wall” structure with nanometer grains. The discussion shows that the template effect of VN is beneficial to the growth of c AlN, but cannot increase its critical thickness remarkably.更多还原