【摘要】 介绍了激光干涉莫尔信号差动式精密定位方法,提出了精密定位装置的粗控和微控两段式控制方式,扩大了装置的定位控制范围,又有效地缩短精密定位时间,实现装置宽控制范围的高速高精度控制。更多还原

【Abstract】 This article introdn ces principle of the differential pre-cision positioning using laser Moire sign als and discusses the macro-control type and micro-control type of a precision a lign-ment system.The principle expands the control range and effec-tizely shor tens precision alignment time for precision alignment.It com fulfil control over high alignment accuracy and high speed of a precision alignment system.更多还原