【摘要】 设计了激光微加工系统中的运动控制系统,探讨了系统的组成、设计与实现.系统由目标值设定器、数字控制器、运动执行机构和位置检测用光栅尺构成.文中重点讨论了闭环运动控制系统中控制目标值的形成、执行机构X Y平台的模型以及运动控制的算法等问题,控制精度达2μm.更多还原

【Abstract】 The composition, designation and realization of the movement control system of laser microprocessing are studied. Form of control setting value, operator XY table model and algorithm of movement control in closed loop control system were studied emphatically.As a result, the position control error of system is smaller than 2 μm with the grating ruler measurement being the standard.更多还原