【摘要】 研究用Sol Gel法在NiTiSMA薄片基体上复合铁电陶瓷薄膜的工艺,讨论了热处理温度对铁电陶瓷层晶化的影响.结果表明,NiTi基体的高温氧化行为直接影响着铁电陶瓷层的结晶过程,并且随着陶瓷层结构的致密化该作用减弱.更多还原

【Abstract】 It is studied that the technique of ferroelectric ceramic thin film has been prepared on NiTiSMA substrate by SolGel method. The effect of heat treatment temperature on structures of ferroelectric ceramic lay and NiTiSMA substrate is discussed. The results show that the oxidation behavior of NITiSMA substrate has great effect on the crystallization of ferroelectric ceramic film , and little effect on it with tightened structure of the ferroelectric ceramic thin film.更多还原