【摘要】 采用非平衡磁控溅射及等离子体离子混合注入方法在奥氏体不锈钢 1 Cr1 8Ni9Ti基体上制备 N/ Ti N/ Ti(N,C) / DLC梯度膜 .研究了类金刚石 (DLC)梯度膜的结构特征和力学性能 .试验结果表明 ,N/ Ti N/ Ti(N,C) / DLC梯度膜最外层为典型的 DLC层 .梯度膜的硬度、弹性模量、断裂韧性以及界面结合强度值分别为 1 9.84GPa、1 90 .0 3GPa、3.75MPa· m1/ 2和 5.68MPa·m1/ 2 .试验所制备的 DLC多层膜比 DLC单层膜具有更好的综合机械性能 .更多还原

【Abstract】 The hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (PIII) was adopted to fabricate diamond like carbon based functionally gradient N/TiN/Ti(N,C)/DLC multilayer coatings on the 304 stainless steel substrate. The structure characterization and mechanical properties of the multilayer coatings were analyzed by GXRD, Raman spectroscopy and nano indenter. The results show that the hardness and elastic modulus, fracture toughness and interfacial fracture toughness of N/TiN/Ti(N,C)/DLC multilayer coatings are about 19.84 GPa, 190.03 GPa, 3.75 MPa·m 1/2 and 5.68 MPa·m 1/2 , respectively. Compared with that of DLC monolayer and C/TiC/DLC multilayer, this DLC multilayer coating has better qualities as a solid lubricating coating.更多还原