【摘要】 针对微波等离子体中样品温度难于准确测定的难题,通过观察微波等离子体中标准测温锥的弯倒情况,测定了反应腔的温度,用于指示相同条件下的样品温度,并和红外辐射高温计法进行了对比,结果发现两种方法具有较好的一致性,而且标准测温锥测定的温度可能更接近于和其性能相近材料的样品温度。另外,还根据标准测温锥中有机粘合剂的碳化痕迹,快速确定了反应腔中的加热区域。更多还原

【Abstract】 The temperatures of microwave plasma cavity was measured using pyrometric reference cones and was used to indicate that of specimen sintered in the same conditions. The temperatures measured using pyrometric reference cones were compared to those of specimens measured using an infrared thermometer. The comparison showed that the two testing methods were coherent. The former might be more accurate to indicate the temperatures of specimens with thermal and electrical properties similar to those of pyrometric reference cones . The hot zone of microwave plasma cavity was also determined by measuring the marks of burned adhesives in the pyrometric reference cones. 更多还原