【摘要】 采用电弧离子镀方法,在Si（100）基底上分别在高纯Ar、高纯H₂和C₂H₂的气氛下沉积类金刚石膜,利用激光Raman谱和X射线光电子能谱（XPS）对沉积膜的结构进行了分析。结果表明与在高纯H₂和C₂H₂气氛下相比,在高纯Ar中沉积类金刚石膜Raman谱的,I_D/I_G值最小,膜中sp³C含量最高为35.55％。纳米压痕仪测量结果表明不同气氛下沉积膜的硬度和弹性模量分别在16.7～34.8GPa和143.2～236.9GPa之间变化。在高纯Ar气氛下沉积膜的硬度和弹性模量最大分别为34.8GPa和236.9GPa。更多还原

【Abstract】 Diamond-like carbon (DLC) films were prepared on Si (100) substrates by using arc ion plating (AIP) technique under Ar, H2 and C2H2 gas atmosphere. The microstructure of the DLC films was characterized by Raman spectra and X-ray photoelectron spectra (XPS) . The results show that the minimal ratio ID/IG is 0.52 and the maximum content of sp3C is 35.55% under Ar compared with that under H2 and C2H2. The mechanical properties of DLC films were determined using nanoindentation technique. The hardness is between 16.7 and 34.8GPa, and the Young’s modulus is between 143.2 and 236.9GPa. The hardness and Young’s modulus of the DLC films deposited under Ar gas obtain a maximum value of 34.8GPa and 236.9GPa, respectively.更多还原