【摘要】 镀制了多种氧化物介质薄膜。用R on 1方法测定了膜层的激光损伤阈值。引入数据处理方法,对测试数据进行分析。结果表明,基片清洗后,若放置一段时间再镀膜,则会影响到镀膜后膜层损伤阈值的均匀性,但对损伤阈值自身大小没有影响。测试激光参数对阈值均匀性也有一定影响。更多还原

【Abstract】 Using a new cleaning technology, K9 glass substrates were cleaned, and some singlelayer films were prepared with various oxide materials on the surface of the substrates using the electron beam evaporation technique. The laser induced damage thresholds of the film were got by using Ron1 test and the experiment repeatability is good. The experiment results show that the placement duration of the substrate after cleaning should influence the homogeneity of the damage threshold of the films, but do not influence the damage thresholds itself. To improve the homogeneity of the film thresholds, films are, as soon as possible, deposited after cleaning. Threshold uniformity is also influenced by laser parameters.更多还原