【摘要】 同位素纯硅片具有特殊的物理性质,在信息技术领域有着非常广阔的应用前景。为获得高丰度28Si,利用国产的高速气体离心机,选择SiF4作为分离的工作介质,对硅同位素进行了离心分离实验。通过单机分离实验,调整气体离心机的有关参数,摸索出适合级联分离的单机参数,同时得到气体离心机分离硅同位素的单位质量数的全分离系数γ0。利用由4台离心机组成的级联,经过6个阶段的分离,得到了28Si丰度达到99.5%的样品。实验结果表明,离心法分离硅同位素是完全可行的。更多还原

【Abstract】 Isotopically pure silicon wafers have many special physical characteristics with potential important applications in information technology. The enrichment of 28Si to high concentrations was investigated experimentally using SiF4 as the working substance in domestically made highspeed gas centrifuges. The centrifuge parameters were chosen for SiF4 separation with the overall unit separation factor, γ0, determined for a single gas centrifuge. 28Si was enriched to a concentration 99.59% in six separation runs using a short cascade composed of only four gas centrifuges. The experimental results show that gas centrifuges can effectively separate the silicon isotope.更多还原