【摘要】 本文设计了一个恒温腐蚀系统,用于微机械加工制作中的腐蚀工艺.系统装备了冷凝回流与加热搅拌装置,保证了腐蚀过程中,腐蚀液浓度的稳定与均匀;特殊设计的加热设备,提高了热量的利用效率.同时,采用内藏式温度传感器和基于模糊专家系统的温度控制算法,使腐蚀系统的温度控制更加精确、灵活.与传统水浴恒温相比,不仅使用方便,而且提高了腐蚀的效率与质量.更多还原

【Abstract】 This paper designs an etching system with constant temperature for etching process in MEMS manufacture. The system is equipped with electromagnetic stirrer and ondensing system to keep the concentration of the etching solution invariable during the whole etching processes. Specially designed heating device is used to improve the efficiency of energy utility. In addition, the temperature control is made more precise and flexible due to the adoption of the hide-in temperature detector and temperature control algorithm based on the fuzzy expert system. Compared with the conventional constant temperature system soaking in the water, the system is easier to use. The quality and efficiency of etching is also improved.更多还原