【摘要】 微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。文章介绍了MEMSCAD的概况和技术特点,提出了一种MEMSCAD的典型体系结构和MEMS建摸与模拟的层次,重点研究了微机电系统中的耦合场分析和宏模型与系统级模拟等关键问题。更多还原

【Abstract】 Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS. The present situation of MEMS CAD and its characteristics are described in the paper. A typical system architecture of the MEMS CAD is presented, together with levels of MEMS’s modeling and simulation. Emphasis is placed on problems with MEMS CAD, such as coupled field analysis and generation of macro-models.更多还原