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一种电容式Al₂O₃湿度传感器

A Study on Al₂O₃ Capacitive Humidity Sensor

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【Author】 WU Haixia, WANG Zhanhe, LI Yinzeng(Dept Electronic Engineering, Beijing Institute of Technology, Beijing 100081, P R China)

【机构】北京理工大学电子工程系；北京理工大学电子工程系北京　100081；北京　100081；北京　100081；

【摘要】在单晶Si片上热生长一层SiO2薄膜,采用真空淀积的方法制备一层Al薄膜,然后利用铝阳极氧化的方法获得一层多孔Al2O3薄膜。设计制作了电容式Al2O3湿度传感器,测试结果表明,该器件具有较好的感湿特性和较宽的感湿范围。更多还原

【Abstract】 In the experiment, a layer of SiO2 film is formed on monocrystalline silicon by thermal growth, and an Al film is deposited on the SiO2 film using vacuumreaction evaporation Then, a porous Al2O3 film is formed with anodic oxidation A capacitive humidity sensor is designed and fabricated on the Al2O3 film The capacitance against humidity characteristics is obviously observed, and the humidity measurement range of the sensor is broad更多还原