【摘要】 工艺综合是一种自顶向下的工艺、器件设计方法。文章通过应用于MOS器件和双极型器件的工艺与器件设计,介绍工艺综合并验证工艺综合思想;介绍了基于工艺综合开发的MO-SPAD软件系统。在工艺综合系统中,使用响应表面法可加速综合的速度。更多还原

【Abstract】 Process synthesis is a new method for designing device and process, with which the topdown idea could be realized This paper illustrates the process synthesis methodology by applying the method to the design of MOSFET’s and bipolar devices A software system, MOSPAD, based on the process synthesis methodology, has been developed Response Surface Method (RSM) is used in MOSPAD, which speeds up the synthesis更多还原