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振动式微机械陀螺的等效电学模型
EQUIVALENT ELECTRICAL MODEL OF VIBRATORY MICROMACHINED GYROSCOPE
【摘要】 根据振动式微机械陀螺的工作原理,建立了其机械特性的等效电路模型。陀螺差分检测电容模型和振动的等效电路模型构成了陀螺的等效电学模型,该模拟模型组合了传感器的机械特性和电学特性。陀螺等效电学模型通过电路模拟工具PSPICE实现,可用于分析陀螺的振动特性、对角速度的频响特性,优化陀螺的工作方式;还可以与接口电路混合模拟,分析陀螺和检测电路的整体性能,优化检测电路的设计。
【Abstract】 An equivalent circuit model of vibratory micro- machined gyroscope’s mechanical properties is derived according to its working principle. Equivalent electrical model of gyroscope consists of differential detection capacitance model and equivalent circuit model of oscillating. This simulated model combines the sensor’s electrical property with mechanical property. The model is implemented in the circuit simulated tool which is called PSPICE, equivalent electrical model of gyroscope is available in oscillating properties analysis and frequency response to angular rate analysis to optimize its working mode. The model also enables the sensor simulate with the interfacing electronics and analyze the whole character of the sensor and its circuit, thus optimizing design of testing circuits.
- 【文献出处】 机械工程学报 ,Chinese Journal of Mechanical Engineering , 编辑部邮箱 ,2003年03期
- 【分类号】TH703
- 【被引频次】4
- 【下载频次】193