【摘要】 对扫描探针显微镜(SPM)的基本原理、成像模式及其在超精密加工中的新应用进行了评述。介绍了SPM在微细加工和光刻新技术中的应用。指出纳米级加工机理的研究将依赖于SPM的复合化和多功能化。只有实现了加工与检测的一体化才能正确评价加工方法及工艺参数的优化选择,从而推进超精密加工技术的发展。更多还原

【Abstract】 A review and description are made of bascic principles,imaging pattern of a scanning probe microscope and its application in ultraprecision machining. This paper gives an overview of SPM application in microfabrication and photofabrication,and indicates that the research of nanometersized machining mechanism will rely on SPM composition and multifunctions. None but the integration of processing and measurement is realized,machining method and optional selection of technological parameter are right evaluated,advancing the development in ultraprecision machining.更多还原