【摘要】 采用两次重复的 2 3 析因实验设计 ,应用方差分析方法 ,研究了旋涂工艺中聚合物溶液的浓度 ,匀胶机的旋涂速度和加速度对旋涂的薄膜厚度和薄膜均匀性的影响 .实验和分析的结果表明 :溶液浓度和旋涂速度对膜厚和薄膜均匀性具有显著性的影响 ,而旋涂加速度对它们的影响则不显著 .这一结论对于制备优质薄膜、改善聚合物发光器件性能具有重要的指导作用更多还原

【Abstract】 Two replicates of the 2 3 factorial design and analysis of variance methods were applied to the study of the film thickness and film uniformity which were influenced by polymer concentration, spin velocity and spin acceleration in process of spin coating. After performing and analyzing a two replicates of the 2 3 factorial experiment, it is concluded that polymer concentration and spin velocity have statistically significant effects on film thickness and film uniformity. Spin acceleration does not. This conclusion is essential for preparing high quality film and improving the performance of polymer LED.更多还原