【Abstract】 The change of frictional force was studied with the increase of scan rate on different Si surface by atomic force microscopy.The results showed that frictional force had different effect with the increasement of scan rate on different surface.To Si surface and hydroxylate silicon surface,it became bigger.It first decreased and then increased on aminopropylsilanixed(APS)silicon surface,taking on conic section relation.It declined on monolayer copper phthalocyaninetetrasulfonic,tetrasodium salt(CuTsPc)molecular deposition film.In the process of scan,frictional heat greatly affected friction and may even change the shape of the film so that plastic flow arouse.更多还原