Titanium oxide thin films and nano powders with photocatalytic activities were prepared via liquid phase deposition (LPD) method by adding H 3BO 3 into an (NH 4) 2TiF 6 solution supersaturated with anatase nano crystalline TiO 2 at 35 ℃. The effects of the deposition conditions on the structure, surface morphology, thickness and performance of the deposited TiO 2 thin films and powder were studied by XRD, AFM, step profilometer, UV Vis and BET methods. Photocatalytic activity of the TiO 2 th...