【摘要】 基于气体直接吸收机理、微机械技术实现的气动红外探测器是对中远波段实现室温探测的新型红外探测器。该探测器的关键结构———微气腔和可动薄膜的腐蚀工艺研究对整个器件的制作有重要意义。根据探测器结构提出了对腐蚀工艺的要求,采用EPW湿法腐蚀的工艺,通过实验研究器件结构制作的最佳腐蚀条件和腐蚀速度,保证了工艺的可控性和器件结构的质量。更多还原

【Abstract】 Pneumatic infrared detector based on gas direct absorption and MEMS technology is a novel infrared detector for mid-far band uncooled infrared detection. Etching study of the key structure,micro-gas-cell and flexible film, is of great importance to device fabrication. Etching requirements for those structures are given and optimal EPW wet etching condition and speed are obtained through experiments, which insure controllability and good quality of device structure.更多还原