【摘要】 给出了自制的 3mm× 3mm位置敏感元件 (PSD)的光谱响应特性 ,覆盖从紫外光、可见光到红外光 (32 0～115 0nm)的广阔区域 .采用光束偏转法对其时间响应特性和位置敏感特性进行测定 .阐述了PSD在卧式原子力显微镜 (AFM)系统中的应用 ,介绍了卧式AFM的工作原理和控制系统 ,提供了部分样品的AFM扫描图像 .结果表明 ,该AFM系统具有较高的成像效率以及良好的工作稳定性、图像重复性和对比度 ,系统的最大扫描范围为 5 μm× 5 μm ,分辨率达到 1nm量级 ,表明PSD在光谱响应、时间响应和位置敏感特性等方面具有优良性能更多还原

【Abstract】 The spectral response of 3mm×3mm position sensitive detector (PSD) covering a wide spectral range from 320nm to 1150nm. The beam deflection method was employed to determine the temporal response and position sensitive properties of the PSD. As an application of the PSD, we developed a horizontal atomic force microscope(AFM), introduced the basic concept and controlling system of the AFM, and presented some sample images scanned by the AFM. The results show that the horizontal AFM is an effcient system for image acquisition, which has an excellent repeatability, reliable stability and ideal image contrast. The maximum scan range is up to 5μm×5μm, and the resolution of the AFM is at the nanometer scale. It is obvious that the new PSD is of outstanding characteristics of spectral response, temporal response and position sensitive property.更多还原