【摘要】 利用等离子体增强化学气相沉积系统沉积了碳纳米管或纤维,并用扫描电子显微镜研究了它们的生长和结构.为避免碳纳米管或纤维在生长过程中从衬底Si表面上脱落,先在Si表面上溅射沉积了金属过渡层Ti或Ta,然后再沉积催化剂NiFe.结果发现Ti和Ta过渡层对碳纳米管或纤维的结构有很大的影响.另外,还发现衬底Si放在支架的不同位置,碳纳米管或纤维的生长方向不同,这可能是由于辉光放电产生的非均匀电场所致.对不同过渡层和电场方向对碳纳米管或纤维生长的影响进行了分析和讨论.更多还原

【Abstract】 Carbon nanotubes or nanofibers were synthesized in plasma-enhanced chemical vaor deposition system and their growth and structure were investigated by scanning electron microscopy. To prevent splitting of carbon nanotubes or nanofibers from Si substrates, Ti or Ta buffer was firstly deposited by sputtering, then catalyst NiFe was deposited. It is found that Ti and Ta buffers greatly affected the structure of carbon nanotubes or nanofibers. Additionally, it is also found there were different growth orientations of carbon nanotubes or nanofibers when Si substrates were placed different places on the holder. It is possible to result from inhomogeneous electrical field produced by plasma. The effects of different buffer and orientation of electrical field on growth and structure of carbon nanotubes or nanofibers were discussed.更多还原