【摘要】 介绍了由弗里曼离子源在惰性气体辅助下产生Ca+、He+的研究及其分别注入钛箔和纳米钛膜的微结构分析。Ca+ 注入Ti箔样品的XPX分析表明:在1×1018/cm2注入剂量下,Ca的含量达到33﹪,注入Ca在钛表面主要形成CaTiO3、CaO和TiO2的化学结合的方式与钛基体连接;He+注入纳米钛样品的XRD的衍射谱在15—40°范围内明显分裂及变得较为尖锐,由谢乐公式计算出的纳米膜样品在(100)(101)晶面晶粒粒度大小分别为20.2nm和19.3nm,表明纳米钛膜注氦后仍保持纳米尺度。而AFM在微米视场下观察到纳米钛膜的表层粒子粒度虽有所长大,但在纳米视场却观察到大量的亚结构,结合AFM观察和XRD的分析结果证明在高剂量注入下,存在纳米钛膜表层粒子同时又被碎化成微晶使注氦纳米钛晶粒仍保持纳米尺度的重要现象。 ++更多还原

【Abstract】 Production of Ca+ and He+ ions by Freeman source under the auxiliary of inert gas and the microstructure analysis of both implanted titanium foil and nano- Ti film were described. The XPX analysis for Ti film specimen implanted by Ca+ ion indicated that Ca content reached to 33 % at the implanted dose of 1×1018/cm2, and the titanium surface appeared mainly in the forms of CaTiO3, CaO and TiO2. It is clear that the implanted calcium linked up with titanium monomeric unit in the chemical conjugation. The XRD spectrum for titanium specimen implanted by He+ splits up obviously, and became more acute at the range of 15—40? The crystal sizes of the nano-film specimen on the crystal face of (100) and (101) calculated by Sherrer mode were 19.3nm and 20.2nm after implantation, still remaining nano-crystalline size. The intragranular crystal of nano-film surface reached a certain growth, and the growth of surface grain size of nano-titanium film was observed by AFM at m-visual field, but a large amount of substructure was still observed at nm-visual field. Hance based on AFM observation and XRD analysis, an important phenomenon was found that the surface granules of nano-titanium film existed after high dose implantation; and meanwhile they split up into micro-crystals remaining nano-crystalline gain size.更多还原