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Sagittal聚焦晶体柔性铰链压弯机构研究

Bending structure based on flexible hinges for sagittal focusing crystal

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【作者】 周仁魁傅翾周泗忠夏绍建何建华温利

【Author】 ZHOU Renkui 1 FU Xuan 1 ZHOU Sizhong 1 XIA Shaojian 2 HE Jianhua 2 WEN Li 1 1 (Xi’ an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’ an 710068) 2 (Shanghai Institute of Nuclear Research, Chinese Academy of Sciences, Shanghai 201800)

【机构】 中国科学院西安光学精密机械研究所中国科学院上海原子核研究所中国科学院西安光学精密机械研究所 西安710068西安710068上海201800西安710068

【摘要】 分析了弧矢聚焦晶体弯曲原理及柔性铰链运动方程 ,阐述了弧矢聚焦晶体柔性铰链压弯机构的原理 ,同时提出了抑制子午形变的有效方法。该压弯机构在 5— 2 0keV能量扫描范围内 ,弧矢聚焦比为 3:1,聚焦曲率相对误差 <0 .75 % ,聚焦光斑弥散为 2 5 % ,在 10keV时聚焦面形误差 <2”。

【Abstract】 The bending principle of sagittal focusing crystal and the movement equation of flexible hinges are analyzed, and the principle of bending structure based on flexible hinges for sagittal focusing crystal is also elaborated. To restrain meridional deformation, an effective method is put forward. Within the arrange of 5-20keV, the sagittal focusing ratio of the bending structure is 3:1, the relative error of focusing curvature is less than 0.75%, and the focusing facula dispersion is 25%. At 10keV the error of focusing surface deformation is less than 2".

  • 【分类号】TH744
  • 【被引频次】2
  • 【下载频次】80
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