Modeling for integrated micromanipulator

【Abstract】 According to the principle of a piezoelectric scanner, a three degree-of-freedom (D.O.F) micromanipulator driven by piezoelectric tubes was developed to realize the integration of mechanism and actuator.Through the static analysis of the deflection of piezoelectric tube into four quadrants, a formula has been establish for the relationship between micro-displacement and driving voltage and accordingly, the angular error is analyzed. Experiments show that the micro-displacement calculated using the formula is in good agreement with the measurements. The relative error is less than 5%. Some performances of the micromanipulator show that it can be applied to some micromanipulations.更多还原