【摘要】 提出了一种通过对光学像散量的检测来实现对物体的微位移和微振动进行实时非接触测量的新方法 该方法采用四象限光电探测器测量由于物体相对于光学系统焦点的偏离而引起的像散量 ,参照已标定的物体位置与像散量之间的关系 ,可计算出物体的实际位移或振幅 利用这套系统对压电陶瓷片的振动状态进行了测量 ,得到了振动的振幅及频率 测量结果表明 ,该系统的测量灵敏度优于 17nm更多还原

【Abstract】 A simple, compact and non-contact astigmatic method for real-time nanometer displacement and vibration measurement is presented. A quadrant detector measures the astigmation caused by the deviation of the target to the focus point, and the focus error signal, composed of the outputs of the quadrant detector, indicates the amount of the deviation. Referenced to the calibrated linear correlations between the deviation and the focus error signal, the deviation or the amplitude of vibration can be obtained. The measurement system is setup and the vibration of a piezoelectric ceramic slice that excited by the low AC voltage is measured. The results show that the system can recognize the displacement less than 17 nm.更多还原