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光纤光栅型温湿度传感器的设计与实现
Design and Realization of Temperature and Relative Humidity Sensor Based on FBG
【摘要】 针对目前温湿度测量过程中电量传感器长期稳定性和互换性差的不足 ,以光纤光栅为基础 ,以改性PI薄膜为湿敏涂层 ,研制出了一种新型非电量温湿度传感器 详细阐述了其测量原理、制作工艺及其主要参量的优化确定 ,对其测量范围、测量精度、湿滞特性等主要特征参量进行了试验测定 测试结果表明 :该传感器可在 2 0~ 80℃、10 %~ 90 %测量范围内实现精度为± 0 .2℃和± 5 %的实时测量 ,且具有响应时间短 (≤ 15s)和长期稳定性好等优点
【Abstract】 To overcome the long-term unstability, the low exchanging properties of the electrical temperature and relative humidity sensors at present , a novel non-electrical sensor based on FBGs is designed, in which the relative humidity measurand is deduced from a FBG coated by an improved polyimide film Then its working principle, fabrication procedure and the optimal design of main parameters are described in detail, the testing results of the experiments show that the measurement ranges of this sensor are from 20~80 ℃ in temperature and 10%~90% in relative humidity, the corresponding sensitivities are ±0.2℃ and ±5% , it also has such advantages as a fast relative humidity responsive time( smaller than 15 s), a good long-term stabilities and a good exchanging performance.
【Key words】 Temperature/relative humidity measurement; Fiber Bragg grating; Sensor;
- 【文献出处】 光子学报 ,Acta Photonica Sinica , 编辑部邮箱 ,2003年10期
- 【分类号】TP212.14
- 【被引频次】58
- 【下载频次】802