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光纤光栅型温湿度传感器的设计与实现

Design and Realization of Temperature and Relative Humidity Sensor Based on FBG

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【作者】 张向东李育林彭文达洪新华王卫平武翠琴

【Author】 Zhang Xiangdong 1,Li Yulin 1,Peng Wenda 2,Hong Xinhua 1,Wang Weiping 1,Wu Cuiqin 3 1 Xi′an Institute of Optics and Precision Mechanics ,Chinese Academy of Sciences, Xi′an 710068 2 Opto-electronics Institute of Shenzhen University,Shenzhen 518060 3 The Second Artillery Engineering Institute, Xi′an 710065

【机构】 中国科学院西安光学精密机械研究所深圳大学光电子学研究所第二炮兵工程学院 西安710068西安710068深圳518060西安710025

【摘要】 针对目前温湿度测量过程中电量传感器长期稳定性和互换性差的不足 ,以光纤光栅为基础 ,以改性PI薄膜为湿敏涂层 ,研制出了一种新型非电量温湿度传感器 详细阐述了其测量原理、制作工艺及其主要参量的优化确定 ,对其测量范围、测量精度、湿滞特性等主要特征参量进行了试验测定 测试结果表明 :该传感器可在 2 0~ 80℃、10 %~ 90 %测量范围内实现精度为± 0 .2℃和± 5 %的实时测量 ,且具有响应时间短 (≤ 15s)和长期稳定性好等优点

【Abstract】 To overcome the long-term unstability, the low exchanging properties of the electrical temperature and relative humidity sensors at present , a novel non-electrical sensor based on FBGs is designed, in which the relative humidity measurand is deduced from a FBG coated by an improved polyimide film Then its working principle, fabrication procedure and the optimal design of main parameters are described in detail, the testing results of the experiments show that the measurement ranges of this sensor are from 20~80 ℃ in temperature and 10%~90% in relative humidity, the corresponding sensitivities are ±0.2℃ and ±5% , it also has such advantages as a fast relative humidity responsive time( smaller than 15 s), a good long-term stabilities and a good exchanging performance.

【基金】 国家自然科学基金资助项目 ( 6 0 1770 2 8)
  • 【文献出处】 光子学报 ,Acta Photonica Sinica , 编辑部邮箱 ,2003年10期
  • 【分类号】TP212.14
  • 【被引频次】58
  • 【下载频次】802
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