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用反射法自动测量大尺寸样品的折射率分布
Automatically Profiling Refractive Index of a Large Sample by Using Reflection Method
【摘要】 针对大尺寸样品的折射率分布测量 ,引入自动扫描装置和适时数据处理系统 ,研究出一种高灵敏度的智能化反射法折射率分布测量仪 ,可进行快速、自动、准确的折射率分布测量 经理论分析和实验研究提出了一套合理的实验数据处理方法 并具体介绍和详尽分析了实验装置 ,讨论了有关理论和实验误差 ,给出了消除各种误差的有效方法 ,最终得出较为理想的实验结果
【Abstract】 A high sensitive and intellectualized refractometer with automatic scanning set and real-time data processing system for profiling large sample′s refractive index is introduced, which can rapidly, automatically and accurately give measurement result. A method of data processing is presented and experimental setup is elaborated. Moreover, the theoretical and experimental errors are analyzed and discussed, and the techniques for reducing the errors are suggested.
【关键词】 折射率分布测量;
反射法;
自动扫描;
适时处理;
【Key words】 Refractive index profile measurement; Reflection method; Automatic scanning; Real-time processing;
【Key words】 Refractive index profile measurement; Reflection method; Automatic scanning; Real-time processing;
- 【文献出处】 光子学报 ,Acta Photonica Sinica , 编辑部邮箱 ,2003年07期
- 【分类号】TH741.4
- 【被引频次】6
- 【下载频次】91