【摘要】 详细阐述了电子散斑时间平均法振动测量技术的原理 ,通过对影响测量精度的诸因素进行理论和实验分析 ,提出通过应用连续相位扫描技术克服相移系统相移不准确所带来的误差 通过散斑平均技术的实施 ,消除散斑对测量精度的影响 在实验中得到了满意的测量结果 通过线性近似法 ,解决了振幅低于 30nm的振动测量问题 ,从而使系统分辨率达到亚纳米级 ,测量精度达到纳米级更多还原

【Abstract】 The theory of time average ESPI is described in detail. Through the analysis of factors that affect the accuracy of measurement experimentally and theoretically,a new method to correct error caused by inexact phase-shifting is put forward. By application of time average ESPI, effect of speckle on the accuracy of measurement is eliminated.A satisfying result of measurement is acquired in experiment. The problem in measurement of vibration whose amplitude is under 30 nm is settled through linearity approximation, which enables system resolution to reach subnanometre and makes the accuracy of measurement achieve nanometer.更多还原