【摘要】 利用光纤自聚焦透镜作为F-P干涉仪的反射面,根据F-P干涉光谱相邻波峰之间的波长差与其干涉腔长之间的关系,实现微位移的测量。克服了光强型F-P传感器测量结果受光源波动影响、难以识别位移方向等缺点,可直接测量绝对位移,并可识别位移方向。经实验得到其位移测量误差小于2.5nm。更多还原

【Abstract】 In order to eliminate the measurement error produced from light source fluctuation in FP displacement sensor systems, and to distinguish the direction of measured displacement, displacement is measured by a FP absolute displacement sensor that uses the two nearby wavelengths fringe of in the FP interference optical spectrum. A GRIN lens coated with highreflection films at the fiber end and a highreflection mirror fixed on the surface in question form the FP interferometer. The proposed technique is able to distinguish directly the absolute value and direction of the displacement. The measurement error is less than 25 nm.更多还原