【摘要】 首次提出利用光谱特性来确定晶体厚度。从理论上推导出其实现的可行性 ,然后结合实验分析了测量系统的具体实现过程及计算厚度的算法 ,并分析了影响测量精度的主要因素。更多还原

【Abstract】 The theoretical basis of crystal thickness determination based on spectroscopic methodology is introduced for the first time in this paper. The implementation of the measurement system and the algorithm of calculating crystal thickness are also presented. Finally, the factors affecting the measurement result are also discussed.更多还原