【摘要】 提出制作连续微光学元件的一种新技术———液晶实时掩膜技术 ,阐述了其基本原理和制作方法。基于部分相干光成像理论 ,采用计算机模拟了用实时掩膜制作微透镜和微轴锥镜阵列的过程。同时建立了实验装置进行实验 ,用全色银盐干板 (Kodak 131)通过酶刻蚀得到口径为 118.7μm ,深为 1.32 2 μm的 5 6× 48的轴锥镜的列阵。更多还原

【Abstract】 A new technique for fabrication of continuous microoptical elements by using LCD (liquid crystal display) real-time mask is proposed, and its principle and design method are expatiated. Based on partial coherent imaging theory, the process to fabricate the micro-axicon and the microlens has been simulated. The experimental setup for LCD real-time mask technique was built by using the color LCD in {authors′} laboratory. and the micro-axicon array has been fabricated. The 3|dimensional surface relief structure was shaped in the pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The caliber of axicon is 118.7 μm, and the etching depth is 1.322 μm.更多还原