【摘要】 通过自行研制扫描隧道显微镜(ScanningTunnelingMicroscope,以下简称STM)检测了超精机械加工试件表面微观形貌,生成三维立体形貌图,对微观形貌图进行分析.了解相关的加工机理及微观表面形貌缺陷发生的原因,为提高超精加工表面质量及优化加工工艺过程提供了一些参考依据.更多还原

【Abstract】 The surface microtopography of ultra precision processed samples was measured and analyzed by scanning tunneling microscopy, and threedimension topography was produced. It is understand for some related process mechanism and the reason that the surface microtopography blemish has taken place. Some reference basics are provided for improving the ultra precision processed surface quantity and optimizing the craft process.更多还原