【摘要】 利用光密度曲线模型优化可写光盘的染料旋涂工艺。模型具有4个特征点和3个特征线段。特征点的位置反映了平移效应和填充效应的综合效果。特征线段的斜率反映了薄膜表面的平面度。借助模型分析旋涂工艺中的许多重要参数,从而控制盘片质量,并最终实现闭环生产控制。更多还原

【Abstract】 An optical density curve model for optimizing the dye coating process of recordable disc is introduced. This model has 4 characteristic points and 3 c haracteristic line sections. The positions of characteristic points represent co mbination of horizontal shifting effect and filling effect. And the slopes of ch aracteristic line sections represent planarization of film surface. This model c an be used as an analysis tool of many important parameters in the coating proce ss, thereby control the disc quality. Finally the closed loop production control is realized.更多还原