【摘要】 目前原子力显微镜(AFM)已经成为纳米加工领域中一种重要的加工手段,但由于其自身扫描陶管及针尖等因素的影响,AFM的微加工能力在很大程度上受到限制。利用三维微动工作台结合原子力显微镜以及锋利的金刚石针尖组成微加工系统,通过编程获取微结构的轮廓,选择RS＿232串口作为通讯方式,发送字符串命令控制工作台的运动实现预定的轨迹,从而消除了扫描陶管运动范围有限且存在漂移和滞后的影响,解决了氮化硅和单晶硅针尖加工材料范围有限的问题,提升了AFM的加工能力,并加工出较为复杂的微结构及微传感器。实验表明这是一种可行的微加工方法。更多还原

【Abstract】 It is proposed to establish a micro_machining system with a three_dimension micro_displacement stage, an AFM system working in Contact and Height mode and a sharp diamond tip. A closed loop system is composed of the tip, the PSD, the feedback circuit, the scanning PZT, and the controller computer to keep the load force at the tip constant. A RS₂32 serial port is used to perform the communication between a computer and the stage with programs provided to get the geometric locus of the microstructure, and then control the movement of the stage. Experimental results indicate that this system proposed is able to fabricate microstructures and parts, for example, micro sensors. The precision of their shape and dimension is mainly determined by the high precision stage. The depth can be changed by the load force of the tip or the feed of the stage. The working range of the AFM is therefore extended and almost any of the materials can be machined with this system. High precision and complex microstructures can be fabricated by optimizing the parameters.更多还原