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微机械陀螺传感器模型与接口电路的混合模拟
Mixed Simulation of Micromach ined Gyroscope’s Sensor Model and Interfacing Circuits
【摘要】 根据微机械陀螺的动力学方程建立了组合微机械陀螺振动特性和电学特性的传感器等效电路模型 ,并通过电路模拟工具 PSPICE对模型进行验证。利用该模型与接口电路的混合模拟 ,可以分析陀螺整个系统的工作性能。模拟分析的结果验证了该模型可以应用于微机械陀螺接口电路的设计和优化
【Abstract】 Sensor electrical model of vibratory micromachined gyrosc ope is established according to its dyna mics equation, which combine the sensor’ s oscillating properties and electrical properties. The model is implemented in the circuit simulation tool PSPICE. The model also enables the sensor simulation with the interfacing circuits to analyz e performanes of the whole system. Simul ated results show that the model may be applied in design and optimum of testing circuits.
【关键词】 微机械陀螺;
传感器模型;
接口电路;
模拟;
【Key words】 micromachined gyroscope; sensor model; interfacing circuits; si mulation;
【Key words】 micromachined gyroscope; sensor model; interfacing circuits; si mulation;
【基金】 国家 973项目“集成微光机电系统研究”的资助 (课题编号 :G19990 3 3 10 1)
- 【文献出处】 固体电子学研究与进展 ,Research & Progress of Solid State Electronics , 编辑部邮箱 ,2003年04期
- 【分类号】TP212
- 【被引频次】9
- 【下载频次】298