【摘要】 (Ba,Sr)TiO3(简称BST)铁电薄膜较传统的铁电材料有高介电常数、高击穿场强、快响应速度、居里温度可调等优点,在DRAM、微波调节器等领域具有广阔的发展前景,是目前国际上新型功能材料研究的热点之一。通过对铁电薄膜及其制备技术研究新进展的综合评述,就BST的微观结构、性能及应用,深入分析BST铁电薄膜主要制备技术的优缺点,指出了目前铁电薄膜及其制备技术研究中应注意的问题。更多还原

【Abstract】 Ferroelectric thin film is one of the functional material with attractive applying prospects in DRAM,and tunable microwave devices due to its good properties of high dielectric constancy,high electric breakdown,quick response,tunable Curie temperature etc.Recent studies on ferroelectric thin films and the related processing techniques are reviewed.The microstructure,the characteristics,and the application of ferroelectric thin films are described in this paper.The advantages and disadvantages of different processing methods of ferroelectric thin films are discussed.Some research problems for the processing of this material that need to be paid attention to are put forward.更多还原