【摘要】 利用 (1 0 0 )硅片和偏 2 5°的 (1 1 1 )硅片制作了静电驱动扭臂结构微反射镜型 2× 2光开关。微反射镜、自对准V型槽和扭臂结构是在 (1 0 0 )硅片上制作的 ,反射镜与光纤槽之间靠晶向自对准 ,反射镜与光轴垂直度较好。在偏 2 5°的 (1 1 1 )硅片上制作倾斜下电极结构 ,实验测得的 pull in电压为 1 3 2V ,几乎比平面下电极的 pull in电压降低一半。采用准直光纤耦合 ,开关的插入损耗小于 1 4dB ,串话小于 - 5 0dB。更多还原

【Abstract】 A micromechanical torsion beam reflective micromirror optical switch driven by electrostatic was fabricated with (100) silicon and tilted 2 5° (111) silicon. The reflective micromirror, self aligned V grooves and torsion beam were fabricated on (100) silicon. The reflective micromirror and V grooves are self aligned, and the perpendicularity between micromirror and optical axis is well. The slanted under electrode was fabricated on tilting 2 5° (111) silicon. The pull in voltage obtained in the experiment is 13 2V, it is almost half of that based on the flat under electrode. The insertion loss is less than 1 4dB, the crosstalk is less than -50 dB.更多还原