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催化剂对CVD涂层Al2O3的影响
Influence of Catalyst to Al2O3 Coated by CVD Method
【摘要】 研究CVD法制备的Al2 O3 涂层其不同的结晶形貌对刀具使用寿命等的影响 ,着重阐述在Al2 O3 涂层过程中 ,通过添加催化剂的方法可以获得所需晶型
【Abstract】 The influence of different crystal form of Al 2O 3 coating made by CVD method to the cutting tools’ service life is researched. It is represented emphasized that the needed crystal form can be obtained by adding catalyst while the Al 2O 3 coating is producing.
- 【文献出处】 工具技术 ,Tool Engineering , 编辑部邮箱 ,2003年07期
- 【分类号】TG174.4
- 【下载频次】72