【摘要】 探讨了一种新型金刚石膜压力传感器的优化设计方法,采用了计算机辅助设计,用数值计算中的有限元理论和ANSYS程序,模拟传感器承载金刚石膜的应力场分布,确定了掺硼金刚石压敏电阻条的尺寸、最佳位置和排列方式。结果证明,按该设计研制的金刚石膜压力传感器输出信号达到了较高灵敏度和较好的稳定性。更多还原

【Abstract】 An optimal design method of novel diamond pressure sensors was demonstrated.Adopting the finite element analysis(FEA) with the ANSYS program,the stress and strain distribution of the loading diamond film was simulated by using the theories of plate bend.The optimum position and arrangement of four piezoresistances on rectangle diaphragm and the optimum dimension of the piezoresistances were determined.The results show that the sensors fabricated by this method have higher sensitivity and superior stability.更多还原