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纳米晶体TiO₂多孔膜的制备

Preparation of Nanocrystalline Porous TiO₂ Thin Films

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【Author】 TANG Jie-ying 1, ZHANG Xu-ping 2, MENG Li-li 1 (1.Key Laboratory of Micro-Electro-Mechanical-Systems of Education Minist ry of China, Southeast University, Nanjing, 210096, China; 2.Research Center of Optical Communication Engineering, Nanjing Univ ersity, Nanjing, 210093, China)

【机构】东南大学微电子机械系统教育部重点实验室；南京大学光通信工程研究中心；东南大学微电子机械系统教育部重点实验室南京； 210096；南京； 210093； 210096；

【摘要】采用电子束蒸发方法成功制备了用于光电变色器件的纳晶多孔结构 Ti O2 薄膜 ,借助于俄歇仪 (AES)和原子力显微镜 (AFM)分析了制备条件对薄膜的表面形貌、粒径大小及化学计量比的影响。最终给出了制备光电变色器件用纳晶多孔结构 Ti O2 薄膜的工艺参数更多还原

【Abstract】 The nanocrystalline porous TiO 2 thin films used in photoelectrochromic device s were prepared by the electron beam evaporation. The surface morphology, partic le size and stoichiometry affected by preparing conditions were analyzed with AE S and AFM. The technique parameters were given for the preparation of nanocrysta lline porous TiO 2 thin films used in photoelectrochromic devices.更多还原