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改性溶胶-凝胶法制备ZrO₂纳米晶粉及其团聚控制

Preparation of ZrO₂ Nano-crystal Powders by Modified Sol-gel Method and Agglomeration Control

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【Author】 ZHAO Qing1,3,CHANG Ai min1, JIAN Jia wen2, BA Wei zhen1 (1.Xinjiang Technical Institute of Physics &Chemistry,Chinese Academy of Sciences,Urumqi 830011;2.Institute of Microelectronics,University of Electronics Science and Technology,Chengdu 610054;3.Institute of Graduate Student,Chinese Academy of Sciences,Beijing 100039,China)

【机构】中国科学院新疆理化技术研究所；电子科技大学微电子与固体电子学院；中国科学院新疆理化技术研究所新疆乌鲁木齐830011中国科学院研究生院；北京100039；新疆乌鲁木齐830011；四川成都601154；新疆乌鲁木齐830011；

【摘要】对溶胶 -凝胶法进行改性 ,使凝胶聚沉为沉淀物 ,进而可以成功地合成ZrO2(9%Y2O3)纳米粉体。采用热重 -差热(TG -DTA)分析、粒度分布分析、透射电子显微镜(TEM)和X射线衍射(XRD)测试法对粉料制备工艺过程进行了研究。结果表明 ,改性的溶胶 -凝胶法在聚沉前加入分子量大小不同的表面活性剂 ,聚沉后采用无水乙醇超声分散 ,可以有效地消除团聚现象。沉淀产物在450℃以下可以完全分解为ZrO2(Y2O3)粉体 ,600℃煅烧颗粒晶粒度为14nm。更多还原

【Abstract】 ZrO2(9mol%Y2O3)nano crystal powders is prepared by modified sol-gel method massing the gel to precipitate before being dried.The characteristic of powders is analyzed using TG-DTA,granulometer CILAS,TEM and XRD.The results show that the dispersibility of particles can be improved effectively using disperser of different molecular weight before massing and ultrasonic washing with absolute ethyl alcohol after massing.The synthesized precipitate decomposed completely to ZrO2(Y2O3)powders below 450℃and the crystal size of produced powders calcined at 600℃is 14 nm.更多还原